Levon™ HP6 Precision Vacuum Hotplate
Product Detail
Levon™ HP6 Precision Vacuum Hotplate is a vacuum hot plate with a Ø170 mm circular heating plate for wafers up to 6 inches, a temperature control range of RT to 250°C, 0.1°C temperature resolution, ±0.2°C temperature control precision (after the temperature is stable) and ≤1% temperature uniformity.
The HP6 has a manually activated vacuum substrate chuck with a close-contact resist baking mode, a digital temperature controller with an optional linear control function, a thermal-radiation-sealed lid over a hard-anodized aluminum heating plate and an independent control circuit for the heating output. The full anodized aluminum body has a recessed heating element design with compact dimensions (370 × 270 × 126 mm, W × D × H) for glovebox integration. Vacuum is connected at the rear-panel outlet (6 mm outer diameter); the vacuum input requirement is 0.04–0.09 MPa.
Why choose the HP6
Specifications General — HP6
| Parameter | Specification |
|---|---|
| Brand | Levon™ by ACS Material |
| Model | HP6 |
| SKU # | LVHP0600 |
| Product Type | Vacuum hotplate |
| Heating plate | Ø170 mm circular, hard-anodized aluminum |
| Applicable substrate size | Wafers up to 6 inches |
| Temperature control range | RT to 250°C |
| Temperature resolution | 0.1°C |
| Temperature control precision | ±0.2°C (after the temperature is stable) |
| Temperature uniformity | ≤1% |
| Temperature controller | Digital temperature controller with optional linear control function |
| Vacuum chuck | Manually activated vacuum substrate chuck; close-contact resist baking mode |
| Vacuum interface | Rear-panel outlet, 6 mm outer diameter |
| Vacuum input requirement | 0.04–0.09 MPa |
| Lid | Thermal-radiation-sealed lid |
| Body | Full anodized aluminum body; recessed heating element design for glovebox integration |
| Heating output | Independent circuit control |
| Power input | 220 V, 1,000 W |
| Dimensions [W × D × H] | 370 × 270 × 126 mm |
| Packing | Carton packaging |
| Warranty | 1-year product warranty |
Package contents
| Supplied with the instrument | Qty |
|---|---|
| Levon™ HP6 Precision Vacuum Hotplate main unit | 1 |
External utilities, where required, are supplied by the user. Package contents reflect the current published configuration; the itemized bill of materials is confirmed on the quotation.
Where it fits
Frequently asked questions
What temperature range and precision does the HP6 offer?
RT to 250°C with 0.1°C resolution; temperature control precision ±0.2°C after the temperature is stable; temperature uniformity ≤1%.
How is the wafer held?
By a manually activated vacuum substrate chuck with a close-contact resist baking mode. Vacuum is connected at the rear-panel outlet (6 mm outer diameter); the vacuum input requirement is 0.04–0.09 MPa.
Which substrate sizes fit?
Wafers up to 6 inches on the Ø170 mm circular heating plate.
Can it be used in a glovebox?
Yes, the recessed heating element design with compact dimensions (370 × 270 × 126 mm) is intended for glovebox integration.
What power input does it need?
220 V, 1,000 W.