Levon™ EZ6-S Benchtop Spin Coater
Product Detail
Levon™ EZ6-S Benchtop Spin Coater is a benchtop spin coater with an industrial BLDC motor system under MCU control, a 7-inch full-color touchscreen HMI, a rotation speed range of 100–12,000 rpm and an adjustable acceleration range of 100–30,000 rpm/s.
The EZ6-S stores 10 spin programs with 10 steps for each program (10 programs × 10 steps), with a maximum spin time of 3,000 s at 0.1 s resolution. It has a powder-coated metal enclosure, specialized anti-resin-infiltration and anti-resin-clogging features, and a vacuum and lid safety interlock system. Three kinds of chuck (10 mm, 25 mm and 2-inch) are supplied, the unit can be configured for AC 110 V or AC 220 V, and it can be upgraded with a single-channel precision metering dispensing system.
Why choose the EZ6-S
Specifications General — EZ6-S
| Parameter | Specification |
|---|---|
| Brand | Levon™ by ACS Material |
| Model | EZ6-S |
| SKU # | LVEZ6S00 |
| Product Type | Spin coater |
| Rotation speed range | 100–12,000 rpm |
| Spin speed resolution | 1 rpm |
| Adjustable acceleration range | 100–30,000 rpm/s |
| Max spin time | 3,000 s |
| Time resolution | 0.1 s |
| Programs | 10 spin programs with 10 steps for each program |
| Motor and control | Industrial BLDC motor system with MCU control |
| Operation | 7-inch full-color touchscreen HMI |
| Enclosure | Powder-coated metal enclosure |
| Safety | Vacuum and lid safety interlock system |
| Chucks | Three kinds of chuck: 10 mm, 25 mm, 2-inch |
| Power supply | AC 110 V or AC 220 V (choose one) |
| Option | Upgradeable single-channel precision metering dispensing system |
| Dimensions [W × D × H] | 295 × 386 × 250 mm |
| Weight | 12 kg |
| Packing | Carton packaging |
| Warranty | 1-year product warranty |
Uniformity data EZ6-S
| Wafer size | Within-wafer | Wafer-to-wafer | Film thickness | Photoresist |
|---|---|---|---|---|
| 4-inch | ±0.53% | ±1.09% | 1350 nm | AZ1500 (20 CP) |
| 6-inch | ±1.20% | ±1.89% | 4400 nm | SPR220-4.5 (123 CP) |
Values apply only to the listed wafer sizes, film thicknesses and photoresists.
Accessories Chucks
| Accessory | Description | Image |
|---|---|---|
| Chucks (10 mm, 25 mm, 2-inch) | Three kinds of chuck supplied in the standard configuration: 10 mm, 25 mm and 2-inch. |  |
Accessory images shown for reference; the supplied configuration is confirmed on the quotation.
Package contents
| Supplied with the instrument | Qty |
|---|---|
| Levon™ EZ6-S Benchtop Spin Coater main unit (AC 110 V or AC 220 V, as ordered) | 1 |
| Chucks: 10 mm, 25 mm, 2-inch | 3 kinds |
Accessories are listed above. External utilities, where required, are supplied by the user. Package contents reflect the current published configuration; the itemized bill of materials is confirmed on the quotation.
Where it fits
Frequently asked questions
What speed and acceleration does the EZ6-S offer?
Rotation speed range: 100–12,000 rpm (1 rpm resolution); adjustable acceleration range: 100–30,000 rpm/s. Max spin time 3,000 s, time resolution 0.1 s.
How many programs can be stored?
10 spin programs with 10 steps for each program, operated from the 7-inch full-color touchscreen HMI.
Which power supply is available?
The EZ6-S can be configured for AC 110 V or AC 220 V; the configuration is selected when ordering.
What uniformity data is available?
4-inch: within-wafer ±0.53%, wafer-to-wafer ±1.09% (1350 nm, AZ1500, 20 CP). 6-inch: within-wafer ±1.20%, wafer-to-wafer ±1.89% (4400 nm, SPR220-4.5, 123 CP). The data apply only to these conditions.
Can a dispensing system be added?
Yes. The EZ6-S is upgradeable with a single-channel precision metering dispensing system.