Levon™ AC300-S-EN Servo Spin Coater
Product Detail
Levon™ AC300-S-EN Servo Spin Coater is a servo-driven spin coater for oversized and heavy substrates up to 12-inch (300 mm) wafers, with PLC control, a 7-inch full-color touchscreen, a maximum speed of 5,000 rpm (no load) and a maximum acceleration of 1,000 rpm/s (no load).
The AC300-S-EN has a stainless steel alloyed Teflon inner cavity and a stainless steel housing, precision vacuum pressure regulation with a real-time digital vacuum display, and handles fragments smaller than 1 cm up to standard 12-inch wafers. BSR and EBR functions and splash-proof cover washing and developing functions can be added, and custom solutions are available for larger substrate sizes, heavy-duty substrates and chamber vacuum specifications. The published product drawing also lists table panel and groove depth dimensions of 767 × 656.5 × 375 mm.
Why choose the AC300-S-EN
Specifications General — AC300-S-EN
| Parameter | Specification |
|---|---|
| Brand | Levon™ by ACS Material |
| Model | AC300-S-EN |
| SKU # | LVAC3SEN |
| Product Type | Servo spin coater |
| Maximum speed | 5,000 rpm (no load) |
| Speed resolution | ±1 rpm |
| Maximum acceleration | 1,000 rpm/s (no load) |
| Maximum rotation time | 3,000 s |
| Rotation time resolution | 0.1 s |
| Substrate size range | Fragments smaller than 1 cm to standard wafers up to 12 inches |
| Drive | Servo motor drive |
| Control and operation | PLC control, 7-inch full-color touchscreen |
| Chamber and housing | Stainless steel alloyed Teflon inner cavity, stainless steel housing |
| Vacuum | Precision vacuum pressure regulation; real-time digital vacuum display |
| Vacuum input requirement | 0.06–0.09 MPa; minimum vacuum flow rate >15 L/min |
| Options | BSR and EBR functions; splash-proof cover washing and developing functions |
| Custom solutions | Larger substrate sizes, heavy-duty substrates, chamber vacuum specifications |
| Dimensions [W × D × H] | 707 × 596.5 × 273 mm |
| Table panel and groove depth dimensions [W × D × H] | 767 × 656.5 × 375 mm |
| Packing | Wooden case |
| Warranty | 1-year product warranty |
Uniformity data AC300-S-EN
| Wafer size | Within-wafer | Wafer-to-wafer | Film thickness | Photoresist |
|---|---|---|---|---|
| 4-inch | ±0.65% | ±0.22% | 1470 nm | AZ1500 (20 CP) |
| 6-inch | ±0.76% | ±0.91% | 1320 nm | AZ1500 (20 CP) |
| 8-inch | ±0.62% | ±1.39% | 2260 nm | AZ1500 (20 CP) |
| 12-inch | ±1.16% | ±0.70% | 490 nm | AZ1500 (4.4 CP) |
Values apply only to the listed wafer sizes, film thicknesses and photoresists.
Package contents
| Supplied with the instrument | Qty |
|---|---|
| Levon™ AC300-S-EN Servo Spin Coater main unit | 1 |
External utilities, where required, are supplied by the user. Package contents reflect the current published configuration; the itemized bill of materials is confirmed on the quotation.
Where it fits
Frequently asked questions
What substrate sizes can the AC300-S-EN handle?
From fragments smaller than 1 cm to standard wafers up to 12 inches (300 mm). Custom solutions are available for larger substrate sizes and heavy-duty substrates.
What speed and acceleration are published?
Maximum speed 5,000 rpm (no load), speed resolution ±1 rpm; maximum acceleration 1,000 rpm/s (no load). Maximum rotation time 3,000 s at 0.1 s resolution.
What uniformity data is available?
Within-wafer / wafer-to-wafer: 4-inch ±0.65% / ±0.22% (1470 nm), 6-inch ±0.76% / ±0.91% (1320 nm), 8-inch ±0.62% / ±1.39% (2260 nm), all AZ1500 (20 CP); 12-inch ±1.16% / ±0.70% (490 nm, AZ1500 4.4 CP). The data apply only to these conditions.
Which options are available?
BSR and EBR functions, splash-proof cover washing and developing functions, and custom solutions for larger substrate sizes, heavy-duty substrates and chamber vacuum specifications.
How does it differ from the AC300-S-CTM?
The AC300-S-CTM has a PTFE-coated stainless steel chamber with a powder-coated metal enclosure, product dimensions of 715 × 610 × 295 mm and a published maximum acceleration of 10,000 rpm/s (no load).