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Levon™ DM200-SE Enclosed Benchtop Spin Developer

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SKU# LVDM200F

Product Detail

Levon™ DM200-SE Enclosed Benchtop Spin Developer is a fully enclosed spin developer for substrates from fragments to 200 mm (8-inch) wafers, with a spin speed of 20–3,000 rpm (no load), an acceleration of 20–10,000 rpm/s (no load) and 100 customizable programs.

Levon DM200-SE enclosed benchtop spin developer with a front control panel, adjustment knob and three front ports
Levon™ DM200-SE Enclosed Benchtop Spin Developer — image shown for reference.

The DM200-SE has a 3-channel developer configuration, including one rinse channel and one nitrogen drying channel. It has a Teflon-coated stainless steel interior, an anti-corrosion housing with a non-stick surface, and a built-in filter for pump protection. Vacuum pressure is adjustable with live monitoring, and liquid delivery and recovery (suction) are adjustable. Tailored options include 4-channel configurations or custom wafer sizes.

Why choose the DM200-SE

Fully enclosed developmentFully enclosed development chamber.
Anti-corrosion housingAnti-corrosion housing with a non-stick surface.
Teflon-coated interiorTeflon-coated stainless steel interior.
Pump protectionBuilt-in filter for pump protection.
Vacuum controlAdjustable vacuum pressure with live monitoring.
Flow and suction adjustmentAdjustable liquid delivery and recovery (suction).
3-channel developer1 × rinse and 1 × nitrogen drying channel within a 3-channel configuration; 4-channel configurations are available as a tailored option.
100 customizable programsSingle-step or multi-step mode with 100 customizable programs.
Spin speed (no load)
20–3,000 rpm
Acceleration (no load)
20–10,000 rpm/s
Wafer size
Fragments to 8-inch
Programs
100
Developer channels
3

Specifications General — DM200-SE

ParameterSpecification
BrandLevon™ by ACS Material
ModelDM200-SE
SKU #LVDM2000
Product TypeSpin developer
Supported wafer sizeFrom fragments to 200 mm (8-inch wafer)
Spin speed20–3,000 rpm (no load)
Speed resolution±1 rpm
Spin acceleration20–10,000 rpm/s (no load)
Recipe time setting0–3,000 s per step; time setting precision 0.1 s
Maximum spin time30,000 s
Spin time resolution0.1 s
ProgramsSingle-step or multi-step mode with 100 customizable programs
Developer channels3 channels, including 1 × rinse and 1 × nitrogen drying
Development chamberFully enclosed
InteriorTeflon-coated stainless steel
HousingAnti-corrosion housing with non-stick surface
Pump protectionBuilt-in filter for pump protection
Vacuum controlAdjustable vacuum pressure with live monitoring
Flow and suctionAdjustable liquid delivery and recovery
Tailored options4-channel configurations or custom wafer sizes
Dimensions [W × D × H]550 × 600 × 405 mm
Weight35 kg
PackingPacked in a wooden case
Warranty1-year product warranty
DM200-SE dimensional drawing showing 550 mm width, 600 mm depth and 405 mm height.
DM200-SE overall dimensions: 550 × 600 × 405 mm (W × D × H).

Package contents

Supplied with the instrumentQty
Levon™ DM200-SE Enclosed Benchtop Spin Developer main unit1

External utilities, where required, are supplied by the user. Package contents reflect the current published configuration; the itemized bill of materials is confirmed on the quotation.

Where it fits

For enclosed spin development of substrates from fragments to 200 mm (8-inch) wafers, with programmable spin speed (20–3,000 rpm, no load), single-step or multi-step programs and rinse and nitrogen drying channels. For custom AC200-based developing systems (AC200-DEV-CTM), see the AC200 page. The DM200-SE is designed for compact semiconductor research.

Frequently asked questions

What spin speed and acceleration does the DM200-SE offer?

Spin speed 20–3,000 rpm (no load) with ±1 rpm speed resolution; spin acceleration 20–10,000 rpm/s (no load).

Which substrate sizes are supported?

From fragments to 200 mm (8-inch) wafers. Custom wafer sizes are available as a tailored developer solution.

How are development programs set?

Single-step or multi-step mode with 100 customizable programs. Recipe time setting 0–3,000 s per step with 0.1 s setting precision; maximum spin time 30,000 s; spin time resolution 0.1 s.

How many developer channels are there?

The standard configuration has 3 channels, including 1 × rinse and 1 × nitrogen drying. 4-channel configurations are available as a tailored option.

What are the dimensions and weight?

550 × 600 × 405 mm (W × D × H), 35 kg, packed in a wooden case.

Levon™ AC200 Programmable Servo Spin Coater — servo spin coater family (AC200-S-PP / -SE / -PE / -SE-PLUS) for fragments to 8-inch wafers.
Levon™ AC300-S-CTM Servo Spin Coater (up to 12″) — servo spin coater for substrates up to 12-inch (300 mm) wafers.
Levon™ EZ6-S Benchtop Spin Coater — benchtop spin coater, 100–12,000 rpm, 7-inch touchscreen, 10 programs × 10 steps.
Levon™ IC8000-S Heated Spin Coater — heated spin coater, spin table RT to 200°C, substrates up to 6-inch.
Levon™ is a trademark of ACS Material, LLC. Disclaimer: ACS Material, LLC believes the information on this page is accurate and represents the best and most current information available to us. Specifications reflect the current published data; final configurations are confirmed at quotation — always refer to the model datasheet for confirmed model-specific specifications, never exceed the rated speed of the instrument or of the fitted chuck, and follow your laboratory’s safety procedures for spin processing and the handling of developers and solvents. ACS Material makes no representations or warranties, express or implied, regarding suitability for any purpose, and will not be responsible for damages resulting from use of or reliance upon this information.