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Silicon/Silicon Dioxide Wafer

Silicon/Silicon Dioxide Wafer

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Si/SiO2 substrate

Product Detail

CAS No.: 7440-21-3 / 7631-86-9

Silicon/Silicon Dioxide Wafers

 

Type A

Type B

Type C

Size

4 inch (Diameter)

4 inch (Diameter)

6 inch (Diameter)

1.5x1.5cm

Oxide Thickness (nm)

90

300 +/- 20

300 +/- 20

300 +/- 20

Color

Violet

Violet

Violet

Violet

Wafer Tickness (µm)

500+/-20

500 +/-10

670 +/- 20

670 +/- 20

Resistivity (ohm·cm)

1-10

<0.01

<0.01

<0.01

Type/Dopant

N

P

P

P

Orientation

< 100 >

<100>

<100>

<100>

Front Surface

Polished

Polished

Polished

Polished

Back Surface

Etched

Etched

Etched

Etched

Package Size

5 p/pack

1 p/pack

1 p/pack

1 p/pack

 

NOTE: Type B and Type C are the same substrates we used for our CVD Graphene on Si/SiO2 product.

 

Disclaimer: ACS Material, LLC believes that the information in this Technical Data Sheet is accurate and represents the best and most current information available to us. ACS Material makes no representations or warranties either express or implied, regarding the suitability of the material for any purpose or the accuracy of the information contained within this document. Accordingly, ACS Material will not be responsible for damages resulting from use of or reliance upon this information.

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