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Silicon/Silicon Dioxide Wafer

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Si/SiO2 substrate

Product Detail

CAS No.: 7440-21-3 / 7631-86-9 

Si/SiO2 wafers from ACS Material are the industry standard for high-quality substrates. Our high-quality violet wafers are packaged in a 1000 class cleanroom and provide optimal visibility for a variety of nanomaterials, including CVD graphene and graphene flakes.

Silicon/silicon dioxide substrates are ideal for a variety of uses, including as FET substrates, or in X-ray studies, surface microscopy analysis, or to assist with ellipsometry measurements. Our Si/SiO2 wafers are polished on the front, etched on the back, and fit in a substrate rack for convenient batch processing and cleaning. 

ACS Material provides leading researchers and engineers around the world with the highest-quality nanomaterials and other supplies. We take pride in our reputation for the purity and consistency of our materials, for the quality of our customer service, and for the fairness of our prices.

Shop online today for the finest research materials. Our team is available to answer all your questions to make certain you get the materials you need to take your research to the next level.

Silicon/Silicon Dioxide Wafers

 

Type A

Type B

Type C

Size

4 inch (Diameter)

4 inch (Diameter)

6 inch (Diameter)

1.5x1.5cm

Oxide Thickness (nm)

90

300 +/- 20

300 +/- 20

300 +/- 20

Color

Violet

Violet

Violet

Violet

Wafer Tickness (µm)

500+/-20

500 +/-10

670 +/- 20

670 +/- 20

Resistivity (ohm·cm)

1-10

<0.01

<0.01

<0.01

Type/Dopant

N

P

P

P

Orientation

< 100 >

<100>

<100>

<100>

Front Surface

Polished

Polished

Polished

Polished

Back Surface

Etched

Etched

Etched

Etched

Package Size

5 p/pack

1 p/pack

1 p/pack

1 p/pack

 

NOTE: Type B and Type C are the same substrates we used for our CVD Graphene on Si/SiO2 product.

 

Disclaimer: ACS Material, LLC believes that the information in this Technical Data Sheet is accurate and represents the best and most current information available to us. ACS Material makes no representations or warranties either express or implied, regarding the suitability of the material for any purpose or the accuracy of the information contained within this document. Accordingly, ACS Material will not be responsible for damages resulting from use of or reliance upon this information.

Research Citations of ACS Material Products